Graphite Susceptor

Advantages of graphite susceptor

Graphite susceptor is commonly in the form of disc-shaped, block-shaped or customized irregular structures, and its advantages are very prominent.

Outstanding high-temperature resistance

It can maintain structural stability without deformation or performance degradation in an ultrahigh-temperature environment above 1500°C.

Excellent electromagnetic induction characteristics

It can rapidly absorb radio frequency or microwave energy and convert it into thermal energy, achieving efficient and uniform heating.

High mechanical strength

It can withstand relatively large load pressure and thermal stress.

Extremely stable chemical properties

It has good resistance to most corrosive gases and chemical reagents.

High heat conduction efficiency

It can quickly transfer heat, which ensures temperature consistency during the process.

Easy to be mechanically processed and surface-treated

You can customize it in size and shape according to different process requirements.

Uses of graphite susceptor

Semiconductor manufacturing field

In precision processes such as chemical vapor deposition (CVD) and physical vapor deposition (PVD) in chip manufacturing, you can use it as the core carrier platform for the wafer. Because of the outstanding high thermal conductivity, it can achieve a uniform distribution of the wafer surface temperature in milliseconds. Thus ensuring the consistency of thin film deposition. And its high chemical stability can effectively resist the invasion of corrosive gases and impurities. This significantly reduces the defect rate of chips and greatly improves the yield rate and electrical performance of chip manufacturing.

Crystal growth field

Graphite susceptor is also plats an important role in the growth process of high-end crystals such as sapphire and silicon carbide. It not only provides stable support for the crystals but also creates a uniform and stable temperature environment through precise thermal field control technology. This controllable growth condition can precisely control the growth rate, crystal orientation and internal structure of the crystal, which effectively reduces dislocation and impurity defects. These make it an indispensable key basic component for preparing large-sized and high-quality single crystal materials.

Metallurgical industry

In metallurgical equipment such as vacuum induction furnaces and electric arc furnaces, it serves as the high-temperature resistant load-bearing core. It can withstand the tremendous pressure and severe thermal shock of high-temperature metal liquids. With its excellent chemical inertness, it can effectively prevent chemical reactions with active metals in high-temperature environments. So it eliminates the introduction of impurities from the source and ensures the high purity and stable quality standards of the smelted products.

Solar photovoltaic industry

You can also use it in the key process links such as high-temperature diffusion and annealing in silicon wafer manufacturing. Graphite susceptor plays the role of precise support and efficient transmission of the silicon wafer. Due to the stable mechanical properties and thermal conductivity characteristics, it can ensure that the silicon wafers do not deform or displace during high-temperature processing, promoting the uniform diffusion of impurity atoms. Then it significantly improves the photoelectric conversion efficiency of the silicon wafers and the overall production efficiency. Thereby helping the photovoltaic industry reduce costs and increase efficiency.